Semiconductor manufacturing apparatus and method thereof
US7847270B2 · kind B2 · utility
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1References
18Claims
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Key dates
| Filing date | Apr 27, 2006 |
| Grant date | Dec 7, 2010 |
| Priority date | — |
| Expiry date | Oct 7, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70991
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
According to the present invention, there is provided a semiconductor manufacturing apparatus having:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.