Micro-cantilever
US7847469B2 · kind B2 · utility
2Cited by
12References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 22, 2008 |
| Grant date | Dec 7, 2010 |
| Priority date | — |
| Expiry date | May 31, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
Abstract
A micro-cantilever of a simple structure and capable of obtaining a larger displacement at a low voltage including a plate-like piezoelectric substrate having electrode films as an upper electrode and a lower electrode formed on both surfaces thereof, a plate-like resilient member in close contact with the piezoelectric substrate on the side of the lower electrode and a support for supporting a driving member in a cantilever manner, in which a thin-walled portion is formed to the vicinity of a base portion of the driving member supported by the support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.