Method of reducing the time required to perform a passive voltage contrast test
US7848562B1 · kind B1 · utility
0Cited by
8References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 26, 2005 |
| Grant date | Dec 7, 2010 |
| Priority date | — |
| Expiry date | Oct 7, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The time required to perform a passive voltage contrast test of an area of interest of a layer of interest is substantially reduced by digitizing a passive voltage contrast image to form contrast data that represents the image, and comparing the contrast data to computer aided design (CAD) data that defines the semiconductor device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.