Method of improving corrosion resistance of stainless steel surfaces by a process of passivation
US7850786B2 · kind B2 · utility
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17References
16Claims
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Key dates
| Filing date | Oct 17, 2006 |
| Grant date | Dec 14, 2010 |
| Priority date | — |
| Expiry date | Apr 3, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49906
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Described is a space-conserving integrated fluid delivery system particularly useful for gas distribution in semiconductor processing equipment. The system includes integrated fluid flow network architecture, and may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. The layered substrate is diffusion bonded. Subsequent to diffusion bonding, a stainless steel diffusion bonded part may advantageously be treated to enhance corrosion resistance using a series of steps designed to bring more chromium to the surface of the steel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.