Nanostructure arrays and methods for forming same
US7850941B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 20, 2006 |
| Grant date | Dec 14, 2010 |
| Priority date | — |
| Expiry date | Nov 28, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/893
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for forming an array of elongated nanostructures, includes in one embodiment, providing a substrate, providing a template having a plurality of pores on the substrate, and removing portions of the substrate under the plurality of pores of the template to form a plurality of cavities. A catalyst is provided in the plurality of cavities in the substrate, and the pores of the template are widened to expose the substrate around the catalyst so that the catalyst is spaced from the sides of the plurality of pores of the template. A plurality of elongated nanostructures is grown from the catalyst spaced from the sides of the pores of the template.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.