Composition for removing an insulation material, method of removing an insulation layer and method of recycling a substrate using the same
US7851372B2 · kind B2 · utility
2Cited by
7References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 2, 2006 |
| Grant date | Dec 14, 2010 |
| Priority date | — |
| Expiry date | Nov 18, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02079
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In one aspect, a composition is provided which is capable of removing an insulation material which includes at least one of a low-k material and a passivation material. The composition of this aspect includes about 5 to about 40 percent by weight of a fluorine compound, about 0.01 to about 20 percent by weight of a first oxidizing agent, about 10 to about 50 percent by weight of a second oxidizing agent, and a remaining water.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.