Eliminating inline positional errors for four-point resistance measurement
US7852093B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 17, 2006 |
| Grant date | Dec 14, 2010 |
| Priority date | — |
| Expiry date | May 9, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R27/08
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Calculating resistance correction factors includes contacting the arms of a four-arm probe with a test sample; selecting a first set of first and second arms and a second set of third and fourth arms; applying a first current from the first arm to the second arm of the first set; detecting a first voltage between the third and fourth arms of the second set; calculating a first resistance using the first voltage and current; selecting a third set of first and second arms including no more than one arm of the first set, and a fourth set of third and fourth arms including no more than one arm of the second set; applying a second current from the first arm to the second arm of the third set; detecting a second voltage between the third and fourth arms of the fourth set; calculating a second resistance using the second voltage and current; and calculating a correction factor using the first and second resistances.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.