Separable modulator
US7852544B2 · kind B2 · utility
56Cited by
111References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 1, 2010 |
| Grant date | Dec 14, 2010 |
| Priority date | — |
| Expiry date | Mar 1, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G3/3466
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.