Patent · US Active

Probe holder for a probe for testing semiconductor components

US7859278B2 · kind B2 · utility

2Cited by

14References

15Claims

0Family size

Assignee

SUSS MicroTec Test Systems GmbH · DE

Inventors

Dietmar Runge · Großerkmannsdorf, DE
Stojan Kanev · Sacka, DE
Claus Dietrich · Sacka, DE

Key dates

Filing date	Feb 13, 2007
Grant date	Dec 28, 2010
Priority date	—
Expiry date	Feb 13, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/07342
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe holder in which the probe needle has a slight horizontal offset under the action of a vertical force comprises a probe holder for a probe needle, wherein the holder is adapted, for fastening and electrical contact-connection, on a carrier device of a test apparatus and has a holder arm having a needle holder at the free end thereof to fasten the probe needle, and a fastening arm for connecting the holder arm to the carrier device. The holder arm and fastening arm are connected to one another by a parallel guide whereby horizontal offset of the needle tip on account of external forces can be reduced or even prevented making it easier for the probe needle to carry out a vertical yielding movement, with almost no rotation of the probe needle about a horizontal axis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.