MEMS plate switch and method of manufacture
US7864006B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 8, 2008 |
| Grant date | Jan 4, 2011 |
| Priority date | — |
| Expiry date | Mar 12, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H1/18
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The deformable plate may have a flexible shunt bar which has one end coupled to the deformable plate, and the other end coupled to a contact on the second substrate. Upon activating the switch, the deformable plate urges the shunt bar against a second contact formed in the second substrate, thereby closing the switch. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.