Spin head and substrate treating method using the same
US7866058B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 30, 2007 |
| Grant date | Jan 11, 2011 |
| Priority date | — |
| Expiry date | Jun 24, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A spin head includes a rotatable plate, first chucking pins and second chucking pins for supporting a edge portion of a substrate loaded on the plate, and a driving unit for selectively driving the first and second chucking pins. The driving unit includes a first magnet connected to the first chucking pin and disposed at a first height, a second magnet connected to the second chucking pin and disposed at a second height, and a driving magnet for driving the first and second magnets. The driving magnet is elevated by means of an elevating member to selectively apply a magnetic force to the first or second magnet and moves in the radius outside direction of the first or second chucking pin due to a magnetic force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.