Vacuum pump
US7866940B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 23, 2004 |
| Grant date | Jan 11, 2011 |
| Priority date | — |
| Expiry date | Feb 18, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/24
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A differentially pumped mass spectrometer system comprises a mass spectrometer having a plurality of pressure chambers; a vacuum pump attached thereto and comprising at least three pump inlets, a first pumping section, a second pumping section downstream from the first pumping section, and a third pumping section downstream from the second pumping section, an outlet from a first, relatively low, pressure chamber being connected to a first pump inlet through which fluid can enter the pump from the first chamber and pass through the first, second and third pumping sections towards a pump outlet, an outlet for a second, medium pressure chamber of the spectrometer being connected to a second pump inlet through which fluid can enter the pump and pass through, of said sections, only the second and third pumping sections towards the pump outlet, and an outlet for a third, highest pressure chamber of the spectrometer being connected to a third pump inlet through which fluid can enter the pump and pass through, of said sections, only at least part of the third pumping section towards the pump outlet; and a backing pump connected to the pump outlet such that, in use, at least 99% of the flui…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.