Patent · US Active

Electrical fuse and method of making

US7867832B2 · kind B2 · utility

29Cited by

13References

19Claims

0Family size

Assignee

International Business Machines Corporation · US

Inventors

Chih-Chao Yang · Glenmont, US
Haining Yang · Wappingers Falls, US

Key dates

Filing date	Nov 11, 2008
Grant date	Jan 11, 2011
Priority date	—
Expiry date	May 30, 2029

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/0002
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A semiconductor fuse and methods of making the same. The fuse includes a fuse element and a compressive stress liner that reduces the electro-migration resistance of the fuse element. The method includes forming a substrate, forming a trench feature in the substrate, depositing fuse material in the trench feature, depositing compressive stress liner material over the fuse material, and patterning the compressive stress liner material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.