Method and system for advanced process control using a combination of weighted relative bias values

US7869894B2 · kind B2 · utility

Assignee

• Advanced Micro Devices, Inc. · US

Inventors

• James Broc Stirton · Austin, US
• Andre Holfeld · Wilthen, DE

Key dates

• Filing date: May 26, 2006
• Grant date: Jan 11, 2011
• Expiry date: Aug 3, 2028

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P90/02
• WIPO field: Control
• WIPO sector: Instruments

Abstract

By directly using relative biases, contained in the relative bias date matrix, and by appropriately weighting the components thereof, sampling rate limitations in an APC control scheme may be efficiently compensated for. In particular embodiments, an age-based weighting factor is established that scales measurement data uncertainty according to the delay with which the corresponding measurement data for a specific control thread are obtained.