Tester for testing semiconductor device
US7872488B2 · kind B2 · utility
2Cited by
6References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 25, 2007 |
| Grant date | Jan 18, 2011 |
| Priority date | — |
| Expiry date | Aug 5, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/31932
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A tester for testing a semiconductor device is disclosed. In accordance with the tester of the present invention, the tester is configured to have different drive signal path and input/output signal path wherein the drive signal path has a fly-by structure, i.e. a daisy chain structure and the input/output signal path has a star-stub structure such that more DUTs may be tested simultaneously and an integrity of the signals is secured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.