On-site calibration method and object for chromatic point sensors
US7873488B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 8, 2008 |
| Grant date | Jan 18, 2011 |
| Priority date | — |
| Expiry date | Mar 31, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2210/50
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A chromatic point sensor (CPS) calibration object and characterizing data are provided. The calibration object comprises a flat base plane with steps extending from it. Step measurement points provided by the steps and base plane measurement points provided by portions of the base plane are intermingled along a measurement track. The characterizing data characterizes known heights of the measurement points. A calibration method acquires measurement data such that some base plane measurement points should be at nearly the same measurement distance and therefore have the same common mode errors relative to known base plane measurement point heights. If such base plane measurement points exhibit minimal error variations, then measurements for those and proximate measurement points may provide reliable calibration data. In contrast, error variations outside an expected range indicate unreliable measurements that should be screened or replaced by new calibration measurements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.