Charged particle beam trajectory corrector and charged particle beam apparatus
US7875858B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 7, 2009 |
| Grant date | Jan 25, 2011 |
| Priority date | — |
| Expiry date | Aug 10, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/1534
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention relates to a trajectory correction method for a charged particle beam, and provides a low-cost, high accuracy and high-resolution converging optical system for use with a charged particle beam to solve problems with conventional aberration correction systems. To this end, the present invention uses a configuration which forms electromagnetic field which is concentrated towards a center of a beam trajectory axis, causes oblique of the beam to make use of lens effects and bend the trajectory, and consequently, cancels out large external side non-linear effects such a spherical aberration of the electron lens. Specifically, the configuration generates an electric field concentration in a simple manner by providing electrodes above the axis and applying voltages to the electrodes. Further, the above configuration can be realized trough operations using lenses and deflectors with incident axes and image formation positions that are normal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.