Patent · US Active

Differential waveguide probe

US7876114B2 · kind B2 · utility

35Cited by

997References

20Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

Richard Campbell · Medicine Hat, CA
Michael Andrews · Hillsboro, US

Key dates

Filing date	Aug 7, 2008
Grant date	Jan 25, 2011
Priority date	—
Expiry date	Jan 29, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/06772
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A wafer probe comprises a contact conductively interconnected with the wall of a waveguide channel and supported by a substrate that projects from an end of a waveguide channel.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.