Hybrid system having a non-MEMS device and a MEMS device
US7876167B1 · kind B1 · utility
15Cited by
2References
48Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 8, 2008 |
| Grant date | Jan 25, 2011 |
| Priority date | — |
| Expiry date | Mar 8, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/2426
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A hybrid system having a non-MEMS device and a MEMS device is described. The apparatus includes a non-MEMS device and an integrated circuit including a MEMS device, the integrated circuit formed on a substrate. The integrated circuit includes a control circuit for the non-MEMS device and a MEMS control circuit for the MEMS device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.