Micromechanical system including a suspension and an electrode positioned movably

US7878061B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Johannes Classen · Reutlingen, DE
• Arnd Kaelberer · Neckargemünd, DE
• Patrick Wellner · Neckartenzlingen, DE
• Dietrich Schubert · Reutlingen, DE
• Lars Tebje · Reutlingen, DE

Key dates

• Filing date: Nov 26, 2008
• Grant date: Feb 1, 2011
• Expiry date: Nov 26, 2028

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P15/0802
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical system includes a substrate, a first planar electrode, a second planar electrode, and a third planar electrode. The second planar electrode is movably positioned at a distance above the first planar electrode and the third planar electrode is positioned at a distance above the second electrode.