Mass flow controller
US7881829B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 1, 2007 |
| Grant date | Feb 1, 2011 |
| Priority date | — |
| Expiry date | Jun 7, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7759
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention provides a mass flow controller that can prevent a flow rate change due to a pressure change without sacrificing the speed of response to a change of a flow rate setting value and can be used in a system that can generate a crosstalk.In order to provide the mass flow controller, the mass flow controller has: a control section 5 that calculates an opening control signal to be supplied to a flow rate control valve based on a predetermined calculation formula including at least a flow rate measurement value and a flow rate setting value as parameters and outputs the opening control signal; and a pressure sensor section 4 that measures pressure of a fluid on the upstream side or the downstream side of a flow rate sensor section 2 and outputs a pressure detection signal indicating the pressure value. The control section 5 uses different calculation formulas for a changing period, which is a predetermined period from a point in time when the flow rate setting value changes by a predetermined amount or more, and a stable period, which is the remaining period, and at least in the stable period, the calculation formula further includes the pressure value as a parameter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.