Method and apparatus for direct referencing of top surface of workpiece during imprint lithography
US7883832B2 · kind B2 · utility
31Cited by
2References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 4, 2005 |
| Grant date | Feb 8, 2011 |
| Priority date | — |
| Expiry date | Mar 5, 2028 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29C2043/5841
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
An apparatus (and method) for referencing a surface of a workpiece during imprint lithography, includes an air bearing for mechanically referencing a surface of the workpiece, and a lithographic template coupled to the air bearing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.