Patent · US Active

Microelectromechanical sensor having multiple full-scale and sensitivity values

US7886601B2 · kind B2 · utility

36Cited by

3References

23Claims

0Family size

Assignee

STMicroelectronics SA

Inventors

Angelo Merassi · Vigevano, IT
Sarah Zerbini · Fidenza, IT
Hubert Geitner · Munich, DE
Marco Del Sarto · Monza, IT

Key dates

Filing date	Oct 26, 2007
Grant date	Feb 15, 2011
Priority date	—
Expiry date	Nov 26, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0831
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A microelectromechanical sensing structure is provided with a mobile element adapted to be displaced as a function of a quantity to be detected, and first fixed elements, capacitively coupled to the mobile element and configured to implement with the mobile element first detection conditions. The sensing structure is further provided with second fixed elements, capacitively coupled to the mobile element and configured to implement with the mobile element second detection conditions, which are different from the first detection conditions. In particular, the first and second detection conditions differ with respect to a full-scale or a sensitivity value in the detection of the aforesaid quantity.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.