Low overhead closed loop control system
US7890220B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 3, 2005 |
| Grant date | Feb 15, 2011 |
| Priority date | — |
| Expiry date | Dec 10, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A tool includes a chamber, a network, a sensor, a tool controller, and a pressure controller. The network carries messages to and from devices on the network. A header portion of a message indicates a sender of the message and at least one intended recipient of the message. The sensor measures a pressure within the chamber. The sensor, tool controller, and pressure controller are on the network. The pressure controller controls the pressure within the chamber in response to measurements provided by the sensor and in response to a set point provided by the tool controller. The pressure controller processes header portions of all messages carried on the network to determine the intended recipients of each message and processes at least part of data portions of both messages intended for the pressure controller and at least some messages not intended for the pressure controller.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.