Method for making multi-crystalline film of solar cell
US7892953B2 · kind B2 · utility
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10Claims
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Key dates
| Filing date | Oct 31, 2007 |
| Grant date | Feb 22, 2011 |
| Priority date | — |
| Expiry date | Oct 31, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
Abstract
A method is disclosed to make a multi-crystalline silicon film of a solar cell. The method includes the step of providing a ceramic substrate, the step of providing a titanium-based film on the ceramic substrate, the step of providing a p+-type back surface field layer on the titanium-based film, the step of providing a p−-type light-soaking layer on the p+-type back surface field layer and the step of conducting n+-type diffusive deposition of phosphine on the p−-type light-soaking layer based on atmospheric pressure chemical vapor deposition, thus forming an n+-type emitter on the p−-type light-soaking layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.