Seal ring structures with reduced moisture-induced reliability degradation
US7893459B2 · kind B2 · utility
27Cited by
24References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 10, 2007 |
| Grant date | Feb 22, 2011 |
| Priority date | — |
| Expiry date | Jun 15, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor chip includes a seal ring adjacent to edges of the semiconductor chip; an opening extending from a top surface to a bottom surface of the seal ring, wherein the opening has a first end on an outer side of the seal ring and a second end on an inner side of the seal ring; and a moisture barrier having a sidewall parallel to a nearest side of the seal ring, wherein the moisture barrier is adjacent the seal ring and has a portion facing the opening.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.