Patent · US Active

Semiconductor device with field plate and method

US7897478B2 · kind B2 · utility

4Cited by
2References
32Claims
0Family size

Assignee

Inventor

Key dates

Filing dateDec 18, 2006
Grant dateMar 1, 2011
Priority date
Expiry dateApr 27, 2027

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D84/40

Abstract

A method of making a semiconductor device includes forming shallow trench isolation structures in a semiconductor device layer. The shallow trench isolation structures are U- or O- shaped enclosing field regions formed of the semiconductor device layer which is doped and/or silicided to be conducting. The semiconductor device may include an extended drain region or drift region and a drain region. An insulated gate may be provided over the body region. A source region may be shaped to have a deep source region and a shallow source region. A contact region of the same conductivity type as the body may be provided adjacent to the deep source region. The body extends under the shallow source region to contact the contact region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.