Pattern writing circuit self-diagnosis method for charged beam photolithography apparatus and charged beam photolithography apparatus
US7900185B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 29, 2007 |
| Grant date | Mar 1, 2011 |
| Priority date | — |
| Expiry date | Nov 25, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/78
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A pattern writing circuit self-diagnosis method for a charged beam photolithography apparatus and a charged beam photolithography apparatus which enable to maintain normality of the charged beam photolithography apparatus are provided. The pattern writing circuit self-diagnosis method for a charged beam photolithography apparatus is a pattern writing circuit self-diagnosis method for a charged beam photolithography apparatus which irradiates a charged beam on a target sample to write a desired pattern. Layout information and a pattern writing conditions which is prepared in advance are input to the pattern writing circuit, and processing result data of the pattern writing circuit output as a result of the inputting is collected. The collected processing result data of the pattern writing circuit is compared with correct data. The charged beam photolithography apparatus has means which realizes the pattern writing circuit self-diagnosis method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.