Patent · US Active

Method of manufacturing non-volatile semiconductor storage device

US7902023B2 · kind B2 · utility

7Cited by
0References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 18, 2010
Grant dateMar 8, 2011
Priority date
Expiry dateAug 18, 2030

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10B43/30

Abstract

A non-volatile semiconductor storage device includes: a substrate; a control circuit layer provided on the substrate; a support layer provided on the control circuit layer; and a memory cell array layer provided on the support layer. The memory cell array layer includes: a first lamination part having first insulation layers and first conductive layers alternately laminated therein; and a second lamination part provided on either the top or bottom surface of the respective first lamination part and laminated so as to form a second conductive layer between second insulation layers. The control circuit layer includes at least any one of: a row decoder driving word lines provided in the memory cell array layer, and a sense amplifier sensing and amplifying a signal from bit lines provided in the memory cell array layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.