Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device
US7903259B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 16, 2008 |
| Grant date | Mar 8, 2011 |
| Priority date | — |
| Expiry date | Feb 2, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70625
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for determining the position of a structure (3) on an object (2) in relation to a coordinate system is disclosed. The object (2) is placed on a measuring table (20) which is movable in one plane (25a), wherein a block (25) defines the plane (25a). At least one optical arrangement (40, 50) is provided for transmitted light illumination and/or reflected light illumination. The optical arrangement (40, 50) comprises an illumination apparatus (41, 51) for reflected light illumination and/or transmitted light illumination and at least one first or second optical element (9a, 9b), wherein at least part of the at least one optical element (9a, 9b) extends into the space (110) between the block (25) and an optical system support (100). The block (25) and/or the optical system support (100) separates the illumination apparatus (41, 51) spatially from the plane (25a) in which the measuring table (20) is movable.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.