Mass flow controller with improved dynamic
US7905139B2 · kind B2 · utility
26Cited by
16References
38Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 25, 2008 |
| Grant date | Mar 15, 2011 |
| Priority date | — |
| Expiry date | Jun 3, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0635
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method of compensating for pressure variations in a flow controller entails the use of the compressibility of the gas being controlled to provide a more accurate measurement of the flow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.