Measurement of thin film porosity
US7907264B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 18, 2008 |
| Grant date | Mar 15, 2011 |
| Priority date | — |
| Expiry date | Aug 19, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N15/08
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of measuring a porosity of a film, by measuring a refractive index of the film in a first environment having a first relative humidity to produce a first refractive index measurement. The refractive index of the film is measured in a second environment having a second relative humidity, where the first relative humidity is different from the second relative humidity, to produce a second refractive index measurement. Multiple gases can be used to create the first and second environments. The first refractive index measurement and the second refractive index measurement are input into a model that correlates refractive index to film porosity, to output the porosity of the film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.