Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation

US7907280B2 · kind B2 · utility

Assignee

• J.A. WOOLLAM CO., INC. · US

Inventors

• Blaine D. Johs · Lincoln, US
• Steven E. Green · Lincoln, US
• Craig M. Herzinger · Lincoln, US
• Duane E. Meyer · Lincoln, US
• Martin M. Liphardt · Lincoln, US

Key dates

• Filing date: Nov 4, 2008
• Grant date: Mar 15, 2011
• Expiry date: Sep 9, 2029

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J4/00
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.