Method of establishing a lot grade system for product lots in a semiconductor manufacturing process
US7908023B2 · kind B2 · utility
1Cited by
16References
19Claims
0Family size
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Key dates
| Filing date | Jan 14, 2008 |
| Grant date | Mar 15, 2011 |
| Priority date | — |
| Expiry date | Nov 27, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method of establishing a lot grading system for lots in a semiconductor manufacturing process includes defining a new lot grade for at least one lot in the semiconductor manufacturing process. The at least one lot is has a current lot grade and the new lot grade is dependent upon the current lot grade. The new lot grade is saved in a grading referenced database and the at least one lot in the semiconductor manufacturing process is updated with the new lot grade.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.