System and method for determining a cross sectional feature of a structural element using a reference structural element
US7910885B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 12, 2004 |
| Grant date | Mar 22, 2011 |
| Priority date | — |
| Expiry date | Oct 1, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2817
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method for determining a cross sectional feature of a measured structural element having a sub-micron cross section, the cross section is defined by an intermediate section that is located between a first and a second traverse sections. The method starts by a first step of scanning, at a first tilt state, a first portion of a reference structural element and at least the first traverse section of the measured structural element, to determine a first relationship between the reference structural element and the first traverse section. The first step is followed by a second step of scanning, at a second tilt state, a second portion of a reference structural element and at least the second traverse section of the measured structural element, to determine a second relationship between the reference structural element and the second traverse section. The method ends by a third step of determining a cross sectional feature of the measured structural element in response to the first and second relationships.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.