Patent · US Active

Collector for an illumination system

US7910900B2 · kind B2 · utility

2Cited by

1References

43Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Ralf Stuetzle · Aalen, DE
Udo Dinger · Oberkochen, DE

Key dates

Filing date	Jul 20, 2007
Grant date	Mar 22, 2011
Priority date	—
Expiry date	Jan 18, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG02B2207/123
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

Collectors with mirror shells arranged inside each other, illumination systems equipped with such collectors, projection exposure apparatuses equipped with such illumination systems, methods of manufacturing microelectronic components with such projection exposure apparatuses, and related systems, components and methods are disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.