Lithographic apparatus, and motor cooling device
US7916267B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 29, 2006 |
| Grant date | Mar 29, 2011 |
| Priority date | — |
| Expiry date | Jun 28, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K5/203
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A lithographic device includes a cooling device for removing heat from a motor. The cooling device has a cooling element provided in thermal contact with at least part of the motor. The cooling device further has a cooling duct assembly with a supply duct to supply a cooling fluid to the cooling element, and a discharge duct to discharge the cooling fluid from the cooling element. A pump causes the cooling fluid to flow through at least part of the cooling duct assembly. A flow control device controls a flow rate of the cooling fluid through at least part of the cooling duct assembly, to maintain a predetermined average temperature of the cooling fluid in the cooling element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.