Patent · US Active

Surface reflection encoder scale and surface reflection encoder using the same

US7916305B2 · kind B2 · utility

1Cited by
2References
5Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJun 19, 2008
Grant dateMar 29, 2011
Priority date—
Expiry dateApr 14, 2029

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B5/1861
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A surface reflection encoder scale is used with a surface reflection encoder for detecting a relative movement amount of a member for making a relative move. The surface reflection encoder scale includes a substrate of the member or a substrate provided on the member and a reflection phase grating provided on the substrate and having asperities for changing a phase of reflected diffracted light on its surface. The asperities of the phase grating are formed of a deposition film of metal silicide and chromium.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.