Surface shape metric and method to quantify the surface shape of electronic packages
US7920986B2 · kind B2 · utility
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9Claims
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Key dates
| Filing date | Mar 10, 2008 |
| Grant date | Apr 5, 2011 |
| Priority date | — |
| Expiry date | Apr 2, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B21/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of quantifying a shape of a surface includes measuring an elevation (z) of the surface at a plurality of locations in an x-y plane of the surface. The measurement data is fit to a series expansion in terms of one or more base functions that include a series expansion fit. A vector of shape coefficients are calculated from the series expansion fit. A vector of shape coefficients are output.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.