Vertical type heat processing apparatus and vertical type heat processing method
US7922485B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 7, 2008 |
| Grant date | Apr 12, 2011 |
| Priority date | — |
| Expiry date | May 2, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disclosed is a vertical type heat processing apparatus and a vertical type heat processing method, which can prevent fall down of the boat on a boat carrier mechanism to be caused by an external force, such as an earthquake or the like, by employing a simple structure, while taking a form of the two-boat system. The vertical type heat processing apparatus 1 includes a heating furnace 5 having a furnace port 5a, a cover 17 adapted to close the furnace port 5a, a pair of substrate holding tools 4 each adapted to hold multiple substrates W in a multistage fashion and configured to be placed on the cover 17 via a heat insulating mount 19, and a lifting mechanism 18 adapted to raise and lower the cover 17 so as to carry in and carry out each substrate holding tool 4 relative to the heating furnace 5. When one substrate holding tool 4 is in the heating furnace 5, the other substrate holding tool 4 is placed on a substrate-holding-tool table 22 for loading the substrates W thereon. Each substrate holding tool 4 is carried between the-substrate-holding-tool table 22 and the heat insulating mount 19 due to the substrate-holding-tool carrier mechanism 23. To the substrate-holding-carrier mec…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.