Remote wafer presence detection with passive RFID
US7924159B2 · kind B2 · utility
2Cited by
4References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 30, 2008 |
| Grant date | Apr 12, 2011 |
| Priority date | — |
| Expiry date | Mar 30, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG08B13/2402
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
The present invention involves a system and method of remotely detecting the presence of a wafer comprising, a passive RFID circuit, wherein the RFID circuit is attached to an end of a transfer arm located inside a vacuum chamber of an ion implantation system, a reader located outside the vacuum chamber, and wherein the RFID tag provides an indication relating to whether or not a wafer is secured by the transfer arm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.