Method for approximating an influence of an optical system on the state of polarization of optical radiation

US7924436B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Markus Mengel · Heidenheim, DE
• Michael Totzeck · Schwäbisch Gmünd, DE

Key dates

• Filing date: Feb 7, 2007
• Grant date: Apr 12, 2011
• Expiry date: Sep 7, 2029

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2021/216
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for approximating an influence of an optical system on the state of polarization of optical radiation comprises the steps of providing incoming optical radiation for the optical system in several incoming states of polarization, including at least one incoming state having circularly polarized radiation components; directing the incoming optical radiation onto the optical system; measuring at least one characteristic, including a phase distribution, of a resulting outgoing optical radiation emerging from the optical system with respect to each of the incoming states of polarization; and approximating the influence of the optical system on the state of polarization of optical radiation by evaluating the measured characteristics of the outgoing optical radiation.