Inspection apparatus using template matching method using similarity distribution
US7925076B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 9, 2007 |
| Grant date | Apr 12, 2011 |
| Priority date | — |
| Expiry date | Feb 9, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06V2201/06
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
An inspection apparatus performing template matching of a search image capable of outputting a correct matching position even if a pattern similar to a template exists in the search image is provided. The inspection apparatus includes a template cutout means for cutting out a template from a template selection image, a marginal similarity calculation means for calculating marginal similarity distribution information, which is a similarity distribution of the template selection image to the template, a search image similarity calculation part for calculating search image similarity distribution information, which is a similarity distribution of the search image to the template, a similarity distribution-to-similarity distribution similarity calculation means for calculating similarity distribution-to-similarity distribution similarity information between the marginal similarity distribution information and the search image similarity distribution information, and a matching position determination part for determining a matching position based on the similarity distribution-to-similarity distribution similarity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.