Patent · US Active

Method of making BIOMEMS devices

US7927904B2 · kind B2 · utility

0Cited by

4References

14Claims

0Family size

Assignee

DALSA Semiconductor Inc. · CA

Inventors

Luc Ouellet · Granby, CA
Stephane Martel · Kirk Street, CA

Key dates

Filing date	Jan 4, 2010
Grant date	Apr 19, 2011
Priority date	—
Expiry date	Jan 4, 2030

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T428/24802
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A MEMS device is manufactured by first forming a self-aligned monolayer (SAM) on a carrier wafer. Next, a first polymer layer is formed on the self-aligned monolayer. The first polymer layer is patterned form a microchannel cover, which is then bonded to a patterned second polymer layer on a device wafer to form microchannels. The carrier wafer is then released from the first polymer layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.