Linear electron source, evaporator using linear electron source, and applications of electron sources

US7928411B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Guenter Klemm · Nidda, DE
• Volker Hacker · Schongau, DE
• Hans-Georg Lotz · Grundau, DE

Key dates

• Filing date: Nov 24, 2008
• Grant date: Apr 19, 2011
• Expiry date: Jul 10, 2029

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J37/3053
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A method of charging a web or foil is described. The method includes guiding a web or foil having a thickness of 10 μm or larger with at least on roller; providing a linear electron source having a housing acting as an anode, the housing having side walls; a slit opening in the housing for trespassing of a linear electron beam, the slit opening defining a length direction of the source; a cathode being arranged within the housing and having a first side facing the slit opening; at least one gas supply for providing a gas into the housing; and a power supply for providing a high voltage between the anode and the cathode; and emitting the linear electron beam, wherein the high voltage is adjusted for providing an electron energy to implant electrons of the electron beam within the web or foil.