Coordinate measuring machine and a method for correcting non-linearities of the interferometers of a coordinate measuring machine
US7929149B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 18, 2008 |
| Grant date | Apr 19, 2011 |
| Priority date | — |
| Expiry date | Jul 3, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and a coordinate measuring machine (1) are provided, wherein the non-linearities of an interferometer (24) can be corrected. A measuring stage (20) traversable in a plane (25a) is provided for measurement. The substrate (2) is placed in a measuring stage (20); wherein the position of the measuring stage (20) along each of the motion axes is determined by at least one interferometer (24) in each case. A computer (16) is provided for compensating the non-linearity inherent in each of the interferometers (24), wherein the position of the measuring stage (20) to be determined by the interferometers (24) is arranged along a trajectory (52, 60, 67) of the measuring stage (20), which is composed at least partially of components of the axes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.