Triangulating design data and encoding design intent for microlithographic printing
US7930653B2 · kind B2 · utility
6Cited by
4References
35Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 17, 2007 |
| Grant date | Apr 19, 2011 |
| Priority date | — |
| Expiry date | Dec 22, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3174
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present disclosure relates to fracturing of polygon data, with one application being microlithography. In particular, it relates to preserving data regarding edges and/or vertices of the original polygons as the polygons are triangulated and even if the results of triangulation are further fractured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.