Patent · US Active

Micromechanical device with microfluidic lubricant channel

US7932569B2 · kind B2 · utility

0Cited by

10References

25Claims

0Family size

Assignee

Miradia Inc. · US

Inventors

Dongmin Chen · Saratoga, US
William Spencer Worley, III · Rue de l'Église, US
Hung-Nan Chen

Key dates

Filing date	Sep 26, 2007
Grant date	Apr 26, 2011
Priority date	—
Expiry date	Jan 14, 2030

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/16235
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A micromechanical device assembly includes a micromechanical device enclosed within a processing region and a lubricant channel formed through an interior wall of the processing region and in fluid communication with the processing region. Lubricant is injected into the lubricant channel via capillary forces and held therein via surface tension of the lubricant against the internal surfaces of the lubrication channel. The lubricant channel containing the lubricant provides a ready supply of fresh lubricant to prevent stiction from occurring between interacting components of the micromechanical device disposed within the processing region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.