Electron beam observation device using pre-specimen magnetic field as image-forming lens and specimen observation method
US7939801B2 · kind B2 · utility
2Cited by
4References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 13, 2008 |
| Grant date | May 10, 2011 |
| Priority date | — |
| Expiry date | Oct 30, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2802
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron beam observation device includes a mechanism which disposes a specimen at an upstream side in an electron beam traveling direction outside an objective lens, from which an image is transferred under a magnification of ⅕ to 1/30, in addition to an inside of the objective lens in which a specimen is disposed at a time of ordinary observation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.