Solid immersion lens and related method for making same

US7940477B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Mickael Brun · Eybens, FR
• Salim Mimouni · Grenoble, FR
• Sergio Nicoletti · Le Pont-de-Claix, FR
• Ludovic Poupinet · Seyssinet-Pariset, FR
• Hubert Moriceau · Saint-Égrève, FR

Key dates

• Filing date: Sep 16, 2008
• Grant date: May 10, 2011
• Expiry date: Sep 16, 2028

Classification

• Technology area (CPC G): Physics
• CPC primary: G11B7/1387
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention generally pertains to the field of solid immersion lenses for optical applications in high resolution microscopy. The lens of the invention includes a spherical sector limited by a planar surface and an object having nanometric dimensions arranged on the planar surface at the focus of said solid immersion lens. A light-opaque layer having a central opening with nanometric dimensions can be provided on the planar surface, said opening being centred on the focus of the solid immersion lens. The nano-object can be a tube or a thread having a cylindrical shape. The lens of the invention can be made using lithography techniques.